Pump having freely movable member

ABSTRACT

A pump includes a main chamber and a pair of valves on opposite ends of the main chamber. The respective valves each contain a freely movable member to selectively open and close each respective valve, wherein the freely movable member is formed from at least some of the same material used to form a chamber portion of the respective valves. A force applicator is coupled relative to the main chamber to alternately induce a suction action and an expulsion action.

BACKGROUND

Some electronic devices including mobile computing devices, such astablets, laptop computers, notebook computers, and the like, may allowusers to perform computing functions, social media functions, gamingfunctions, and communicate via email, and the like, in a mobileenvironment.

Whether or not they are mobile, some electronic devices may allow usersto perform medical diagnostic functions, printing functions, etc., whichinvolve moving fluids. In some instances, such fluids may include ink,while in some instances, such fluids may include biological fluids.

BRIEF DESCRIPTION OF THE DRAWINGS

It will be understood that the drawings are used to illustrate at leastsome examples of the present disclosure and are not intended to limitthe scope of the present disclosure.

FIG. 1A is a perspective view schematically illustrating an electronicdevice, according to one example of the present disclosure.

FIG. 1B is a sectional view as taken along lines 1B-1B of FIG. 1A andproviding one schematic illustration of an electronic device, accordingto one example of the present disclosure.

FIG. 2A is a sectional view as taken along lines 2A-2A of FIGS. 1A-1Band providing one schematic illustration of an electronic device,according to one example of the present disclosure.

FIG. 2B is a sectional view as taken along lines 1B-1B of FIGS. 1A-1Band providing one schematic illustration of an electronic device,according to one example of the present disclosure.

FIG. 2C is a partial sectional view schematically illustrating a portionof an electronic device and demonstrating heat rejection, according toone example of the present disclosure.

FIG. 3A is a perspective view schematically illustrating a substratewith an at least partially formed containment structure and pump,according to one example of the present disclosure.

FIG. 3B is a diagram schematically illustrating various shapes of abarrier of a containment structure, according to one example of thepresent disclosure.

FIG. 3C is a top plan view schematically illustrating a barrier of an atleast partially formed containment structure and pumps, according to oneexample of the present disclosure.

FIG. 4 is a sectional view as taken from the view of FIG. 1B andproviding one schematic illustration of an electronic device, accordingto one example of the present disclosure.

FIG. 5 is a sectional view as taken from the view of FIG. 1B andproviding one schematic illustration of an electronic device, accordingto one example of the present disclosure.

FIG. 6 is a perspective view schematically illustrating a coolingcirculation loop for an electronic device, according to one example ofthe present disclosure.

FIG. 7 is a sectional view as taken along lines 7-7 of FIG. 6 andproviding one schematic illustration of an electronic device, accordingto one example of the present disclosure.

FIG. 8 is a sectional view as taken along lines 8-8 of FIG. 6 andproviding one schematic illustration of an electronic device, accordingto one example of the present disclosure.

FIG. 9A is a perspective view schematically illustrating an electronicdevice, according to one example of the present disclosure.

FIG. 9B is a sectional view as taken along lines 9B-9B of FIG. 9A andproviding one schematic illustration of an electronic device, accordingto one example of the present disclosure.

FIG. 9C is a sectional view as taken along lines 9B-9B of FIG. 9A andproviding one schematic illustration of an electronic device, accordingto one example of the present disclosure.

FIG. 10A is diagram schematically illustrating a pump array, accordingto one example of the present disclosure.

FIG. 10B is a block diagram schematically illustrating a coolingmanager, according to one example of the present disclosure.

FIG. 10C is a block diagram schematically illustrating a controlportion, according to one example of the present disclosure.

FIG. 10D is a block diagram schematically illustrating a user interface,according to one example of the present disclosure.

FIGS. 11A, 11B are each a block diagram schematically illustrating anexternal heat exchange mechanism removably coupled to an electronicdevice, according to one example of the present disclosure.

FIG. 11C is sectional view schematically illustrating a portion of anelectronic device, according to one example of the present disclosure.

FIG. 12 is a flow diagram schematically illustrating a method ofmanufacturing an electronic device, according to one example of thepresent disclosure.

FIG. 13 is a perspective view schematically illustrating at least aportion of a pump assembly, according to one example of the presentdisclosure.

FIG. 14A is a top plan view schematically illustrating the pump assemblyof FIG. 13 in a first state, according to one example of the presentdisclosure.

FIG. 14B is a top plan view schematically illustrating pump assembly ofFIG. 13 in a second state, according to one example of the presentdisclosure.

FIG. 15A is a sectional view schematically illustrating the valveassembly and an external force applicator, according to one example ofthe present disclosure.

FIG. 15B is sectional view schematically illustrating a station to whicha pump assembly is removably coupled, according to one example of thepresent disclosure.

FIG. 15C is a sectional view schematically illustrating a pump assemblywith an external force applicator mounted in a substrate, according toone example of the present disclosure.

FIG. 15D is a sectional view schematically illustrating a pump assemblywith an internally-located force applicator mounted in a substrate,according to one example of the present disclosure.

FIGS. 16-19B are each a sectional view like that taken along lines 16-16of FIG. 13 and schematically illustrating a portion of a valve during amethod of making a pump, according to one example of the presentdisclosure.

FIG. 20 is a sectional view like that taken along lines 16-16 of FIG. 13and schematically illustrating a portion of a valve during a method ofmaking a pump, according to one example of the present disclosure.

FIGS. 21-26 are each a sectional view like that taken along lines 16-16of FIG. 13 and schematically illustrating a portion of a valve during amethod of making a pump, according to one example of the presentdisclosure.

FIG. 27 is a flow diagram schematically illustrating a method of makinga pump, according to one example of the present disclosure.

FIGS. 28A-32 are each a sectional view like that taken along line 16-16of FIG. 13 and schematically illustrating a portion of a valve during amethod of making a pump, according to one example of the presentdisclosure.

FIGS. 33-34 are each a block diagram schematically illustrating a fluidejection system, according to one example of the present disclosure.

DETAILED DESCRIPTION

In the following detailed description, reference is made to theaccompanying drawings which form a part hereof, and in which is shown byway of illustration specific examples in which the disclosure may bepracticed. It is to be understood that other examples may be utilizedand structural or logical changes may be made without departing from thescope of the present disclosure. The following detailed description,therefore, is not to be taken in a limiting sense. It is to beunderstood that, in some examples, features of the various examplesdescribed herein may be combined, in part or whole, with each other,unless specifically noted otherwise.

In at least some examples of the present disclosure, cooling is providedfor heat-generating electronic components contained within a sealedhousing of an electronic device. In some examples, the electronic deviceincludes at least one barrier to define a circulation loop in whichdielectric coolant is exposed to each respective heat-generatingelectronic component. In some examples, the electronic device includesat least one pump within the sealed housing to cause circulating flow ofthe coolant throughout the circulation loop. In some examples, thedielectric coolant is exposed to each respective heat-generatingelectronic component. In some examples, the at least one pump is aunidirectional pump in that the at least one pump generates and permitsfluid flow therethrough in just a single direction and prevents fluidflow (through the pump) in an opposite direction.

In some examples, the heat generated by the electronic components isrejected passively through a wall of the sealed housing with thecirculating coolant carrying the heat away from the electroniccomponents to enable such heat rejection to occur, in at least, portionsof the electronic device that generates no heat or less heat.

In some instances, this arrangement is referred to as an on-boardcooling system in that the electronic device is cooled internallywithout being coupled to an external cooling mechanism or heat exchangedevice.

However, in some examples, the electronic device includes a heatexchange portion to enable transferring the heat from the coolant,through the heat exchange portion, to a device external to theelectronic device for mitigating the heat. In some examples, the heatexchange portion of the electronic device is removably coupled relativeto the external heat-mitigating device.

By passively or actively removing heat from an interior of theelectronic device, and in particular, away from the heat-generatingelectronic components within the electronic device, a longevity and/orperformance of the heat-generating electronic components may beenhanced. In addition, because some electronic devices are handheld,mitigating heat within the electronic device may result in a moresatisfying tactile experience for the user.

In some examples, the various pumps described and illustrated herein arenot deployed exclusively for heat mitigation within an electronicdevice, such as (but not limited to) a mobile computing device, tablet,phablet, etc. but instead are deployed for moving fluids within at leasta portion of a fluid ejection system or other microfluidic devices, suchas (but not limited to) a bio-chip diagnostic device or a fluid ejectionsystem. In some examples, such pumps are unidirectional pumps in thatthey generate and permit fluid flow in just a single direction (throughthe pump) and prevent flow in an opposite direction through the pump.

In some examples, the electronic components within the electronic deviceare sealed with an electrically-isolating membrane such that a coolantwith non-dielectric (e.g. electrically conductive) or semi-dielectricproperties may be used instead of using a dielectric (e.g. relativelyelectrically inert) coolant.

In some examples, a pump includes a main chamber and a pair of valves onopposite ends of the main chamber. The valves may include an inlet valveand an outlet valve, wherein the respective inlet valve and outlet valveeach contain a freely movable member to enable selectively opening andclosing each respective valve. In some examples, the outlet valve isexternal to the main chamber. An at least partially elastic membrane maydefine at least one wall of the main chamber. A force applicator may becoupled to the at least partially elastic membrane to alternately inducea suction action and an expulsion action in the main chamber. In thesuction action, the inlet valve is open and the outlet valve is closed.In the expulsion action, the inlet valve is closed and the outlet valveis open. In some examples, the term “closed” refers to providing atleast a significant obstruction and does not necessarily mean that avalve is completely sealed, as further described later.

In some examples, as used herein the term “freely movable member” refersto the ability of a member to move in an unrestrained manner within theboundaries (e.g. walls) of a valve (e.g. inlet valve, outlet valve) inresponse to fluid flow pressure, such as may be exerted by a mainchamber of the pump. In other words, while a freely movable membercannot escape the boundaries of the valve, the member is not bound ortethered to a wall defining the interior (e.g. chamber portion) of thevalve.

In some examples, the main chamber and valves are molded or otherwiseformed as a single, unitary piece and a freely movable member is placedin a chamber portion at least partially forming the respective inlet andoutlet valves. In some examples, the structure of the main chamber,valve chambers, and the freely movable member are formed via layers,with the freely movable member starting as a separable structure withinthe layers and then being later separated (to become free) via removalof a sacrificial portion of one of the layers.

In some examples, formation of a pump is integrated with or performedgenerally contemporaneously with microfabrication of other circuitry andstructures on a printed circuit board (or other substrate) such that atleast some of the same materials and same fabrication steps used to formsuch other circuitry and structures may be used to form at least somecomponents of the pump. In some examples, this arrangement includesforming the pump within and amidst the components of the other circuitryand structures of the substrate. In this way, fabrication of such pumpscan be rapidly achieved without involving a wholly separate fabricationscheme and later attachment of the pump (relative to the other circuitryand structures of the printed circuit board) that otherwise might beinvolved.

At least some of these examples, and additional examples, are describedand illustrated throughout the present disclosure in association with atleast FIGS. 1A-34.

As used herein, no intended substantive difference is intended betweenthe use of the terms “comprising” and “including”, and such terms may beused interchangeably with each term referring to a particular itemhaving at least, but possibly more elements than, the elementsidentified after the term “comprising” or the term “including.”

FIG. 1A is a perspective view of an electronic device 50, according toone example of the present disclosure. Electronic device 50 may takemany different forms and be used for many different purposes, just someof which are identified below. In some examples, the electronic devicemay take the form of a mobile computing device, such as a mobile phone,a tablet, a phablet, etc. In some examples, the electronic device is notmobile. In some examples, the electronic device comprises a bio-chipdiagnostic device providing microfluidic structures to receive andprocess a biologic sample for on-board diagnostic testing. In someexamples, electronic device 50 comprises a fluid ejection system, suchas but not limited to, an inkjet printing system.

As shown in FIG. 1A, the electronic device 50 includes a housing 52defining an enclosure. The housing 52 includes opposite ends 56A, 56Band opposite sides 58A, 58B, as well as a top portion 59A and anopposite bottom portion 59B. In some examples, a display or userinterface 54 is provided on top portion 59A. However, in some examplesthe electronic device 50 omits an externally accessible user interface54.

While FIG. 1A depicts electronic device 50 as having a housing 52 formedas a generally rectangular shape, it will be understood that in someexamples, housing 52 may be formed in other shapes, such as triangular,spherical, n-gon, etc.

FIG. 1B is a sectional view as taken along lines 1B-1B of FIG. 1A andproviding one schematic illustration of an electronic device, accordingto one example of the present disclosure. As shown in FIG. 1B, housing52 of electronic device 50 includes a wall 71 to sealingly contain atleast certain components, which may include at least one electroniccomponent 72A on a printed circuit board 70 or other substrate. In atleast this context, the term “sealingly contain” refers to isolating theinternal components of the electronic device 50 from the environment(e.g. fluids, air, etc.) external to the electronic device 50,preventing any contents (e.g. coolant) within the electronic device 50from exiting the electronic device 50, and providing a physical barrierto maintain elements (e.g. 72A, printed circuit board or substrate 70,coolant, etc.) within the housing 52 of the electronic device 50.

In some examples, the at least one electronic component 72A is referredto as a heat generating member. In some examples, electronic device 50may include additional electronic components, such as electroniccomponent 72B. It will be understood that electronic device 50 is notlimited to a particular quantity of electronic components (e.g. 72A,72B).

In some examples, the electronic components 72A or 72B may comprise acentral processing unit (CPU), memory, input/output circuitry,power-related components, other circuitry, etc.

In some examples, the electronic components (e.g. 72A, 72B) are spacedapart from each other over the surface of the printed circuit board 70.

In some examples, a barrier 76 protrudes from (a surface of) the printedcircuit board 70 and defines a circulation loop 80 through whichdielectric coolant may flow, as directed by pump 74. In some examples,as shown in FIG. 1B, the barrier 76 extends along a substantial portionof a length (D1) of the electronic device 50 with barrier 76 having apair of opposite ends 77A, 77B about which the dielectric coolant flows,as represented by directional arrows F1, F2. As shown in FIG. 2A, gaps85A, 85B at opposite ends 77A, 77B permit the coolant to circulate aboutbarrier 76.

In some examples, the sealed housing 52 and barrier 76 contains a closedand fixed volume of coolant (C), which facilitates a lower energy usagethan otherwise would occur if an open fluid system were employed.

In some examples, the dielectric coolant includes mineral oil orFluorinert™ electrically-insulating coolant fluid, or Novec™ fluid, bothavailable from 3M™ Company of St. Paul, Minn.

In some examples, the electronic components (e.g. 72A, 72B) within theelectronic device 50 are sealed with an electrically-isolating membranesuch that a coolant (C) with non-dielectric or semi-dielectricproperties may be used instead of using a dielectric (e.g. electricallyinsulative) coolant. In some examples, a coolant with non-dielectricproperties or semi-dielectric properties may be at least partiallyelectrically conductive. One example of an arrangement permitting theuse of non-dielectric or semi-dielectric coolant is described and shownlater in association with at least FIG. 11C. Accordingly, while the termdielectric coolant is used generally throughout various examples of thepresent disclosure, it will be understood that a non-dielectric orsemi-dielectric coolant may be used in those examples by implementing asealing arrangement of the electronic components exposed to the coolantas shown in FIG. 11C or via a similar arrangement.

In some examples, barrier 76 is made of a plastic or epoxy moldingcompound (EMC).

In some examples, housing 71 defines an outer shell of the electronicdevice 50 and provides a surface to reject heat to the outsideenvironment, after the dielectric coolant absorbs heat from theelectronic components 72A, 72B, as further demonstrated below inassociation with at least FIG. 2C.

In some examples, the dielectric coolant is exposed to substantially theentire first surface of printed circuit board (on which is mounted theat least one first heat generating member). In some examples, thedielectric coolant is exposed to substantially the entire inner surfaceof at least one shell portion of the housing 52. In some examples, thedielectric coolant is exposed to the entire inner surface of at leastone shell portion of the housing 52.

In some examples, all of the electronic components (e.g. 72A, 72B) onthe printed circuit board 70 acting as heat generating members areexposed to the coolant (C). It will be understood that in some examples“all” such electronic components includes pump(s) 74, with thedielectric coolant being exposed to at least internal components of thepump(s) 74.

As further shown in FIG. 1B, housing 52 has a width (W1). In someexamples, electronic device 50 provides spacing between the pump 74 andelectronic component 72A (e.g. heat generating member), as representedby indicator D2.

In some examples, the pump 74 is positioned within the circulation loopto cause circulating flow of the dielectric coolant about barrier 76. Insome examples, pump 74 extends transversely to the direction of flow ofthe dielectric coolant and occupies an entire width of the circulationloop between barrier 76 and the wall 71 at side 58B of the housing 52,as shown in at least FIG. 1B and the sectional view of FIG. 2B. Asfurther shown in FIG. 2B, in some examples, on a side of the barrier 76opposite to pump 74, housing 52 defines a passage 87 through whichcoolant flows along the circulation loop 80.

In some examples, the pump 74 as described in the examples inassociation with at least FIGS. 1B-10A has the features and attributesas one of the pumps described and illustrated in association with atleast FIGS. 13-32.

However, in some examples, the pump 74 as described in the examples inassociation with at least FIGS. 1B-10A has features and attributes of anoff-the-shelf pump that meets the cooling specifications (e.g.dimensions, volume, flow rate, etc.) for a particular electronic device50. Accordingly, such a pump may have at least some features,attributes, and fabrication different from the pumps described andillustrated in association with at least FIGS. 13-32

In one aspect, as shown in FIG. 2B, the barrier 76 extends a height (H1)above printed circuit board 70. This height is sufficient to allow thecirculating coolant (C) to pass over the heat-generating electroniccomponents.

As shown in FIG. 2C, in operation, coolant (C) passing over anelectronic component 72A experiences heat gain 82A (represented bysymbols “++++”), and as this coolant travels away from the electroniccomponent 72A, the heat is rejected 84 (represented by symbols “− − −”)through the wall 71 of housing 52 (represented by arrows E) to theexternal environment 82B.

FIG. 3A is a perspective view schematically illustrating at least apartially formed fluid containment structure on a substrate 90,according to one example of the present disclosure. In some examples,substrate 90 comprises a printed circuit board. In some examples,substrate 90 comprises at least some of substantially the same featuresand attributes as printed circuit board 70, as previously described inassociation with at least FIG. 1B.

As shown in FIG. 3A, in some examples, at least a portion of a pump 94is monolithic with at least a portion of the substrate 90. In otherwords, at least a portion of the pump 94 is formed in a manner toprotrude from the substrate 90 such that once the pump 94 is formed, aportion of the pump 94 and a portion of the substrate 90 form a singleunitary member.

As shown in FIG. 3A, in some examples, at least a portion of barrier 96is monolithic with a portion of the substrate 90. In other words, atleast a portion of the barrier 96 is formed in a manner to protrude fromthe substrate 90 such that once the barrier 96 is formed, the barrier 96and at least a portion of the substrate 90 form a single unitary member.

With this in mind, in some examples the pump 94 is at least partiallyformed generally contemporaneously with a portion of the substrate 90,in contrast to an arrangement in which the pump could be formedseparately and then attached to the printed circuit board. In someexamples, the barrier 96 is at least partially formed contemporaneouslywith a portion of the substrate 90, in contrast to an arrangement inwhich the barrier 96 could be formed separately and then attached to thesubstrate 90. In some examples, the at least partial contemporaneousformation includes the pump 94 or barrier 96 being at least partiallyformed using at least some of the same materials being used to form aportion of the substrate 90 and at generally the same time that theportion of the substrate 90 is being formed. For instance, formation (orremoval) of a single layer during fabrication of the pump 94 and/orbarrier 96 may cause formation of at least part of the pump 94 or of thebarrier 96 simultaneous with formation of at least part of the portionof the substrate 90.

At least some examples of formation of the pump and/or barriercontemporaneous with a substrate are later described and illustrated inassociation with at least FIGS. 21-32.

Such arrangements can greatly simplify and expedite manufacture ofelectronic devices including such cooling mechanisms via a fluidcontainment system.

In some examples, the barrier 96 is formed from the same material usedto form the substrate 90 and/or to form the pump 94, while in someexamples, the barrier 96 is formed from a different material than thesubstrate 90 and/or pump 94.

In some examples, barrier 96 includes opposite ends 97A, 97B in a mannersimilar to barrier 76 to enable flow of coolant (C) through gaps likegaps 85A, 85B in FIG. 2A.

It will be understood that in some examples, exposure of the coolant to“all” heat generating members within the housing 52 includes the atleast one pump being classified as a heat generating member. In thisinstance, the coolant is directly exposed to at least some internalcomponents of the pump and thereby provides cooling for the pump.

However, in some examples, a reference to the coolant being exposed toall the heat generating members within the housing 52 excludes the atleast one pump because in that instance, the dielectric coolant (C) isexposed to the internals of the pump 74 and not to an exterior of thepump 74.

In some examples, dielectric coolant (C) is exposed to substantially theentire wall 71 of the sealed housing 52 generally facing the electroniccomponents 72A, 72B such that a relatively large surface area isprovided to facilitate heat rejection from the coolant (C) through wall71 to the external environment. In some examples, the portion of wall 71acting as heat rejection tool has a surface area at least one order ofmagnitude greater than a surface area of at least some of the electroniccomponents 72A, 72B. In some examples, the portion of wall 71 acting asheat rejection tool has a surface area at least two orders of magnitudegreater than a surface area of at least some of the electroniccomponents 72A, 72B. In one aspect, this large differential in relativesurface area facilitates heat rejection from the coolant to the externalenvironment.

FIG. 3B is diagram 100 including a top plan view schematicallyillustrating an array of differently shaped barriers 102, 104, 106 of acontainment system, according to one example of the present disclosure.In some examples, one of these shaped barriers is substituted for one ofthe barriers (e.g. 76) of one of the fluid containment systems of anelectronic device described and illustrated throughout the examples ofthe present disclosure. As shown in FIG. 3B, in some examples barrier102 takes the form of a series of barrier portions 103 with small gapspresent between the adjacent barrier portions 103. As shown in FIG. 3B,in some examples barrier 104 has a patterned shape in which differentportions of the barrier 104 are not aligned in single, linear path. Sucha barrier 104 may be implemented to route the barrier 104 among andaround existing structures and/or electronic components on a substrate(e.g. substrate 90).

As shown in FIG. 3B, in some examples barrier 106 has a curved orundulating shape. In some examples, such a barrier may be employedwithin an electronic device having at least some curved shapes and/or toaccommodate curved structures and/or electronic components on thesubstrate 90. In some examples, such a barrier may enhance smoothcoolant flow within the electronic device 50.

FIG. 3C is a sectional view like that of FIG. 1B and schematicallyillustrating an electronic device 110, according to one example of thepresent disclosure. In some examples, the electronic device 110 includesat least some of substantially the same features and attributes aselectronic device 50 (at least FIG. 1B), except for providing a barrierstructure including at least two generally parallel barriers 116A, 116B.Each barrier 116A, 116B functions like barrier 76 in FIG. 1B, except forproviding additional lanes (e.g. 80A, 80B, 80C) of coolant flow. Asshown in FIG. 3C, in some examples each lane 80A, 80B, 80C includes itsown pump 74A, 74B, 74C, respectively, to ensure proper coolant flowalong the barriers 116A, 116B (as represented by directional arrows 80A,80B, 80C) and around the ends of each barrier 116A, 116B (as representedby directional arrows 81B, 81C and 81D, 81E). In some examples, a robustcirculatory flow is ensured as shown in FIG. 3C via placing one pump(e.g. 74A) near one end of the electronic device between barriers 116A,116B to create flow in a first direction (e.g. 80A) and via placing theother two pumps (e.g. 74B, 74C) near an opposite end of the electronicdevice outside the barriers 116A, 116B to create flow in an oppositesecond direction (e.g. 80B, 80C) to cause return of the coolant to thepump 74A.

In some examples, fewer or greater than three pumps (e.g. 74A, 74B, 74C)may be employed. In some examples, the pumps may be positioneddifferently than shown in FIG. 3C. In some examples, fewer or greaterthan two barriers 116A, 116B may be employed.

FIG. 4 is a sectional view of an electronic device like the sectionalview taken along lines 1B-1B in FIG. 1A, except with FIG. 4 depicting anelectronic device 120 having a non-circulation zone 123 external to andat least partially surrounding wall 71 of housing 52, and thereforeexternal to circulation loop 80 within wall 71. Accordingly, in onerespect, wall 71 acts to define one barrier, which at least partiallydefines circulation loop 80. In one aspect, wall 71 (and circulationloop 80) is nested within non-circulation zone 123.

As further shown in FIG. 4, in some examples non-circulation zone 123omits any electronic components, while in some examples, non-circulationzone 123 may include some electronic components, such as electroniccomponent 122A. In some examples, electronic component 122A producesheat in a quantity or at a rate that is one order of magnitude less thana quantity or rate at which electronic components 72A, 72B (containedwithin wall 71) produces heat.

FIG. 5 is a sectional view like the sectional view of FIG. 1B, excepthaving a non-circulation zone 143 external to circulation loop 80.Non-circulation zone 143 is at least partially defined by wall 73B andmay include an electronic component 142A.

In some examples, an electronic device may have multiple, independentcirculation loops, which may be arranged in a nested manner orside-by-side.

In some examples, with regard to the examples described in associationwith at least FIGS. 4-5, the respective electronic components (e.g. 122Ain FIG. 4, 142A in FIG. 5) located in the respective non-circulationzone (e.g. 123 in FIG. 4, 143 in FIG. 5) may comprise a heat generatingmember, which produces heat at least an order of magnitude less than theheat generated by the respective electronic components (e.g. 72A, 72B)in the circulation loop 80 (e.g. circulation zone). In some examples,the electronic components (e.g. 122A, 142A) in the non-circulation zone(123, 143) produce heat at least two orders of magnitude less than theheat generated by the respective electronic components in thecirculation loop 80.

FIG. 6 is a diagram 160 including a perspective view schematicallyillustrating a cooling circulation loop 180 for an electronic device162, according to one example of the present disclosure. In someexamples, electronic device 162 includes at least some of substantiallythe same features and attributes as electronic device previouslydescribed and illustrated in association with at least FIGS. 1A-5,except having a circulation cooling loop 180 which extends on both sidesof a printed circuit board 170. In particular, as shown in FIG. 6,printed circuit board 170 includes opposite ends 179A, 179B, oppositeside edges 193A, 193B, and a top surface 175A and opposite bottomsurface 175B.

As further shown in FIG. 6, electronic device 162 includes a barrier 176protruding from at least surfaces 175A, 175B of printed circuit board170 with barrier 176 having opposite ends 177A, 177B, opposite sides173A, 173B, and opposite top and bottom edges 195A, 195B. In someexamples, end 177A of barrier 176 extends beyond end 179A of printedcircuit board 170 by a distance E1. In some examples, end 179B ofprinted circuit board 170 extends beyond end 177B of barrier 176 by adistance comparable to E1.

As further shown in FIG. 6, electronic device 162 also includes a pump174 positioned on and/or formed on surface 175A of printed circuit board170, and extending from side 173B of barrier 176 to side edge 193B ofprinted circuit board 170. As shown in FIG. 6, electronic device 162includes at least one electronic component 172A, which may beheat-generating member.

Circulation loop 180 includes a first segment 180A and a second segment180B, both of which travel or extend over top surface 175A of printedcircuit board 170, and as such provide for circulating cooling flow overelectronic component 172A. Meanwhile, third segment 180C and fourthsegment 180D (of circulation loop 180) extend over bottom surface 175Bof printed circuit board 170, and as such provide for circulatingcooling flow over any electronic components, such as component 172Bpresent on bottom surface 175B of printed circuit board 170, as shown inFIG. 7. Moreover, the sectional view of FIG. 7 (as taken along lines 7-7of FIG. 6) further illustrates segment 180A of circulation loop 180 overtop surface 175A of printed circuit board 170 and segment 180Dunderneath bottom surface 175B of printed circuit board 170.

FIG. 8 is a sectional view as taken along lines 8-8 of FIG. 6 andfurther schematically illustrating electronic device 162, according toone example of the present disclosure. As shown in FIG. 8, printedcircuit board 170 and barrier 176 effectively divide the enclosure(defined by housing wall 171) into quadrants (193A, 193B, 193C, 193D)with each quadrant corresponding to one of the respective segments(180A, 180B, 180C, 180D) of circulation loop 180.

In one aspect, this arrangement provides for cooling in situations inwhich a printed circuit board 170 has electronic components on oppositesurfaces 175A, 175B and in which cooling of both sides of the printedcircuit board 170 is desired.

FIG. 9A is a perspective view schematically illustrating an electronicdevice 250, according to one example of the present disclosure. In someexamples, electronic device 250 includes at least some of substantiallythe same features and attributes as the electronic devices as previouslydescribed and illustrated in association with FIGS. 1A-8, except for aprinted circuit board 270 exclusively defining the barrier which definesand creates the circulation loop. In other words, in the example ofelectronic device 250 no separate barrier (such as barrier 176 in theexample of FIGS. 6-8) was provided in addition to the printed circuitboard 270 shown in FIGS. 9A-9C.

FIG. 9B is a sectional view as taken along lines 9B-9B of FIG. 9A andproviding one schematic illustration of an electronic device 250,according to one example of the present disclosure. As shown in FIG. 9B,electronic device 250 includes a housing 252 sealingly containingprinted circuit board 270 on which electronic components (e.g. heatgenerating members) 252A, 252B are present and exposed to dielectriccoolant flowing along circulation loop 280 via action of pump 274.

Because side edges of printed circuit board 270 are sealingly secured tothe sides 258A, 258B of a wall 271 of housing 252 (FIG. 9A), the coolantflows about the ends 279A, 279B of printed circuit board 270 such thatprinted circuit board 270 acts as the barrier defining the circulationloop 280. In one example arrangement, sealingly securing the side edges258A, 258B prevents fluid (e.g. coolant) from passing between the sideedges 258A, 258B and the wall 271 of housing 252.

FIG. 9C is a sectional view as taken along lines 9B-9B of FIG. 9A andproviding one schematic illustration of an electronic device 252,according to one example of the present disclosure. In some examples,electronic device 252 comprises the same features and attributes aselectronic device 250, except for having an additional pump 284 on abottom surface 275B of printed circuit board 270 so that each surface275A, 275B has a pump to facilitate coolant flow through the circulationloop 280.

FIG. 10A is diagram schematically illustrating a pump array 350,according to one example of the present disclosure. As shown in FIG.10A, the pump array 350 includes three pumps 354A, 354B, 354C arrangedin an orientation generally parallel relative to the direction of thecoolant flow in the circulation loop. In one aspect, the three pumpsextend transversely across substantially the entire width of thecirculation loop. It will be understood that in some examples, pumparray 350 includes more than three pumps and in some examples, pumparray 350 includes fewer than three pumps. As shown in FIG. 10C, eachpump 354A, 354B, 354C draws a portion 351A, 351B, 352C of coolant (C)across a width of the lane defining the circulation loop 280 tofacilitate relatively uniform fluid flow.

In some examples, as further shown in FIG. 10A, the array 350 of pumpsis arranged in a line generally perpendicular to a direction of coolantflow along the circulation loop 280. In some examples, a barrier (e.g.76 in FIG. 1B) defines the circulation loop as a lane and the array 350of pumps completely occupies the lane. In some examples, the array 350of pumps defines a segment of the circulation loop 80 with the array 350of pumps extending transversely to the direction of flow and extendingbetween the barrier and a side edge of the housing enclosure.

In some examples, an array of pumps are spaced apart from each other andarranged in series along a length of a circulation loop in anorientation generally parallel to a direction of flow in the circulationloop.

FIG. 10B is a block diagram schematically illustrating a coolingmanager, according to one example of the present disclosure. In someexamples, cooling manager 400 acts to manage flow of the dielectriccoolant through the circulation loop to achieve desired management ofthe temperatures of the electronic components within the electronicdevice. In some examples, cooling manager 400 includes a pump selectormodule 402. In some examples, cooling manager 400 includes a temperaturesensing module 420. In some examples, cooling manager 400 includes boththe pump selector module 402 and the temperature sensing module 420.

In some examples, pump selector module 402 includes a position function410, a rate function 412, an on/off function 414, and a sequencefunction 416. In general terms, per position function 410 the pumpselector module 402 determines how many pumps to activate and which pumpto activate based, at least in part, on the relative position of apump(s) relative to the electronic components to be cooled. Meanwhile,rate function 412 tracks and determines a flow rate to be produced bythe pump(s). In some examples, each pump is individually activated ordeactivated per on/off function 414, depending upon the demand for flowat a particular time. In some examples in which all the pumps are notactivated to pump simultaneously, the sequence function 416 tracks anddetermines a sequence by which the different pumps are activated.

In some examples, the pump selector module 402 includes a flow sensingfunction 417 to track a rate of coolant flow, with the flow sensingbeing performed at some pumps and/or at some electronic componentswithin the housing of the electronic device.

In some examples, operation of pump selector module 402 depends at leastpartially on sensed temperatures within the electronic device.

In some examples, in general terms the temperature sensing module 420tracks temperatures within the interior of the electronic device, and inparticular temperatures at or near the electronic components (e.g. heatgenerating member). In some examples, sensing module 420 includes aposition function 422, a rate function 424, and a peak function 426, asfurther shown in FIG. 10B. The position function 422 identifies aposition at which a temperature is sensed, while the rate function 424tracks a rate of temperature change. The peak function 426 tracks a peaksensed temperature, which may occur at a particular position as trackedby position function 422.

In some examples, the temperature sensors may be internal to at leastsome of the electronic components within an electronic device. In someexamples, the temperature sensors may be external to at least some ofthe electronic components. In some examples, the temperature sensor maybe implemented via estimating the temperate of a particular component atleast partially based on a predetermined profile of estimatedtemperatures (for that component) based on a rate of operationsperformed by the particular electronic component.

FIG. 10C is a block diagram schematically illustrating a control portion460, according to one example of the present disclosure. In someexamples, control portion 460 includes a controller 462 and a memory464.

In general terms, controller 462 of control portion 460 comprises atleast one processor 463 and associated memories that are incommunication with memory 464 to generate control signals to directoperation of at least some components of the systems and componentsdescribed throughout the present disclosure. In some examples, thesegenerated control signals include, but are not limited to, employingcooling manager 465 to manage coolant flow within an electronic deviceto thereby manage temperature profiles within an electronic deviceduring operation of the electronic device.

In response to or based upon commands received via a user interface(e.g. user interface 466 in FIG. 10D) and/or via machine readableinstructions (including software), controller 462 generates controlsignals to implement circulation of coolant flow (via a pump) and/ortrack temperatures in accordance with at least some of the previouslydescribed examples and/or later described examples of the presentdisclosure. In some examples, controller 462 is embodied in a generalpurpose computer while in other examples, controller 462 is embodied inat least some of the components described throughout the presentdisclosure, such as one of the electronic components sealingly containedwithin an electronic device and programmed to at least provide coolingoperations within the electronic device.

For purposes of this application, in reference to the controller 462,the term “processor” shall mean a presently developed or futuredeveloped processor (or processing resources) that executes sequences ofmachine readable instructions (such as but not limited to software)contained in a memory. In some examples, execution of the sequences ofmachine readable instructions, such as those provided via memory 464 ofcontrol portion 460 cause the processor to perform actions, such asoperating controller 462 to implement a circulating loop of coolant flowor other fluid movement, as generally described in (or consistent with)at least some examples of the present disclosure. The machine readableinstructions may be loaded in a random access memory (RAM) for executionby the processor from their stored location in a read only memory (ROM),a mass storage device, or some other persistent storage (e.g.,non-transitory tangible medium or non-volatile tangible medium, asrepresented by memory 464. In some examples, memory 464 comprises acomputer readable tangible medium providing non-volatile storage of themachine readable instructions executable by a process of controller 464.In other examples, hard wired circuitry may be used in place of or incombination with machine readable instructions (including software) toimplement the functions described. For example, controller 462 may beembodied as part of at least one application-specific integrated circuit(ASIC). In at least some examples, the controller 462 is not limited toany specific combination of hardware circuitry and machine readableinstructions (including software), nor limited to any particular sourcefor the machine readable instructions executed by the controller 462.

In some examples, user interface 466 comprises a user interface or otherdisplay that provides for the simultaneous display, activation, and/oroperation of at least some of the various components, functions,features, and of control portion 460 and/or the various pumpingarrangements, as described throughout the present disclosure. In someexamples, at least some portions or aspects of the user interface 466are provided via a graphical user interface (GUI).

In some examples, as shown in FIG. 10D, user interface 466 includesdisplay 468 and input 469. In some examples, display 468 is embodied asdisplay 54 in FIG. 1A.

FIGS. 11A, 11B are block diagrams schematically illustrating anelectronic device 501, 521 removably coupled to an external thermalmanagement module, according to one example of the present disclosure.In some examples, except for a mechanism to enable coupling relative toan external thermal management module, the electronic devices 501, 521comprise at least some of substantially the same features and attributesas the electronic devices previously described and illustrated inassociation with FIGS. 1-10D.

As shown in FIG. 11A, diagram 500 depicts an electronic device 501having a heat transfer element 502 positioned at wall 71 of housing 52to be exposed internally within the circulation loop 80 of coolant (C)and to be exposed externally to, and removably couplable to, an externalthermal management module 504. As seen in FIG. 11A, heat 82A(represented by symbols “+++”) produced by electronic component 72A iscarried by circulating coolant (represented by arrow 80) away fromelectronic component 72A and toward (and past) heat transfer element502. Heat transfer element 502, in turn, absorbs the heat 82A andtransfers the heat (represented by arrows T) for handling within and bythe external thermal management module 504 such that relatively coolercoolant (represented by symbols “− − −”) at 84) continues along thecirculation loop 80.

As shown in FIG. 11B, diagram 520 depicts an electronic device 521having a heat transfer portion including heat transfer ports 522A, 522Bpositioned at wall 71 of housing 52 to be in communication with thecirculation loop 80 of coolant (C). The heat transfer ports 522A, 522Bare removably couplable to, and in communication with, interface 530 ofexternal thermal management module 524. As seen in FIG. 11B, heat 82A(represented by symbols “+++”) produced by electronic component 72A iscarried by circulating coolant (represented by arrow 80) away fromelectronic component 72A. At least some heated coolant exits housing 52through port 522A for entry into conduit 526 of thermal managementmodule 524 to allow heat to transfer out of the coolant (as representedby symbols “++++”). The coolant completes its journey through conduit526, re-entering port 522B of electronic device 521 in a relativelycooler state (as represented by symbols “− − −”) at 84 to rejoin theremainder of the coolant (C) traveling in the circulation loop 80 withinhousing 52.

FIG. 11C is a sectional view schematically illustrating a portion of anelectronic device 540, according to one example of the presentdisclosure. In some examples, electronic device 540 includes at leastsome of substantially the same features and attributes of the electronicdevices as previously described in association with at least FIGS.1-11B. In particular, as shown in FIG. 11C, the electronic device 540includes a printed circuit board 70 with at least one electroniccomponent 72A mounted thereon. In addition, a membrane 542 sealinglycovers at least the electronic component 72A to electrically insulatethe circulating coolant (C) from the electronic component 72A. In oneaspect, the term “sealingly covers” refers to preventing the coolant (C)from contacting the electronic component 72 and providing the membrane542 with sufficient thickness and electrical insulating capacity toprevent electrical interaction between the coolant (C) and theelectronic component 72A.

While the coolant is generally a dielectric coolant as previouslydescribed, by providing the electrically-insulating membrane 542, agreater range of coolants having different dielectric qualities may beemployed. In some examples, such coolants may even have non-dielectricor semi-dielectric properties as previously described. In some examples,membrane 542 covers substantially the entire footprint of the printedcircuit board 70. In some examples, membrane 542 covers at least some ofthe electronic components 72A without covering substantially the entirefootprint of the printed circuit board 70.

FIG. 12 is a flow diagram 550 schematically illustrating a method 551 ofmanufacturing an electronic device, according to one example of thepresent disclosure. In some examples, method 551 is performed using atleast some of the functions, components, modules, assemblies, etc. aspreviously described in association with at least FIGS. 1-11C. In someexamples, method 551 is performed using at least some functions,components, modules, assemblies, etc. other than those previouslydescribed in association with at least FIGS. 1-11C.

In some examples, at 552 method 551 includes forming a monolithicstructure including at least one barrier and at least one pumpprotruding from a portion of a printed circuit board, includingarranging the at least one barrier to at least partially define acirculation loop of coolant moved by the at least one pump. Method 551also includes arranging electronic components on the printed circuitboard within the circulation loop, as shown at 554 in FIG. 12. At 556,method 551 includes sealingly enclosing the printed circuit board, theat least one barrier, the at least one pump, and the coolant within ahousing, which at least partially defines the circulation loop.

FIG. 13 is a perspective view schematically illustrating at least aportion of a pump 600, according to one example of the presentdisclosure. While later described in more detail, it will be understoodthat for illustrative simplicity, pump 600 as depicted in FIGS. 13-14Bis shown without a wall that would otherwise sealingly cover thedepicted open portion of the chambers of pump 600. In some examples, theomitted wall comprises an at least partially elastic membrane and insome examples, the omitted wall does not comprise an at least partiallyelastic membrane.

In some examples, pump 600 serves as the pump 74, 94, 174, 274, 284,354A-354C, as previously described in association with at least FIGS.1-11C. FIG. 14A is a top plan view schematically illustrating the pumpassembly 600 in a first state, according to one example of the presentdisclosure. FIG. 14B is a top plan view schematically illustrating thepump assembly 600 in a second state, according to one example of thepresent disclosure.

As shown in FIG. 13, pump 600 includes main chamber 604, first valve606, and second valve 608. In some instances, first valve 606 isreferred to as an inlet valve and second valve 608 is referred to as anoutlet valve. Pump 600 includes opposite ends 610A, 610B, opposite sides612A, 612B, and opposite first and second surfaces 614A, 614B. Mainchamber 604 includes a first wall 620A, opposite side walls 622A, 622B,and partial end walls 623A, 623B. In some examples, first wall 620Acomprises a floor or bottom wall 620A. However, in some examples, firstwall 620A comprises a wall of chamber portion 630A other than a floor orbottom wall. At one end, main chamber 604 is at least partially furtherdefined by curved walls 624A, 624B and port 625. At the other end, mainchamber 604 is at least partially further defined by curved walls 626A,626B and port 629.

In some examples, external to main chamber 604 (e.g. external to port625), outlet valve 608 includes a chamber portion 630B at leastpartially defined by curved walls 631A, 631B, a pair of protrusions641A, 641B, and first wall 620C. In some examples, first wall 620Ccomprises a floor or bottom wall 620C of chamber portion 630B. However,in some examples, first wall 620C comprises a wall of chamber portion630B other than a floor or bottom wall.

The protrusions 641A, 641B are spaced apart from each other to form acentral gap 646 and each protrusion 641A, 641B is spaced apart from arespective one of the curved walls 631A, 631B to form a gap 645A, 645B.Each gap 645A, 645B has a width smaller than an outer diameter of ring640B. Each protrusion 641A, 641B includes a respective inner curvedportion 643A, 643B, each of which generally face toward port 625.

In some examples, the inner curved portions 643A, 643B have a radius ofcurvature generally corresponding to a radius of curvature of an outersurface of ring 640B. In some examples, gap 646 has a width less than anouter diameter of ring 640B, such that ring 640B can releasably engageprotrusions 641A, 641B without passing through gap 646, as furtherdescribed later in association with at least FIG. 14B. Accordingly, insome instances, the inner curved portions 643A, 643B of protrusions641A, 641B together define a seat 647 against which the ring 640Bremovable engages when the respective valve is in an open position.

While outlet valve 608 is external to main chamber 604, in some examplesthe inlet valve 606 is located within main chamber 604 at one end ofmain chamber 604. As shown in FIG. 13, inlet valve 608 is internal togap 629 (i.e. inlet 629) and includes a chamber portion 630A, which isat least partially defined by inner curved walls 626A, 626B, protrusions651A, 651B, and first wall 620B. In some examples, first wall 620Bcomprises a floor or bottom wall of chamber portion 630A. However, insome examples, first wall 620B comprises a wall of chamber portion 630Aother than a floor or bottom wall.

The protrusions 651A, 651B are spaced apart from each other to form acentral gap 656 and each protrusion 651A, 651B is spaced apart from arespective one of the curved walls 626A, 626B to form a gap 627A, 627B(FIGS. 13, 14A). Each gap 627A, 627B has a width smaller than an outerdiameter of ring 640A. Each protrusion 651A, 651B includes a respectiveinner curved portion 653A, 653B, each of which generally faces towardport 629.

In some examples, the inner curved portions 653A, 653B have a radius ofcurvature generally corresponding to a radius of curvature of an outersurface of ring 640A. In some examples, gap 656 has a width less than anouter diameter of ring 640A, such that ring 640A can releasably engageprotrusions 641A, 641B without passing through gap 656, as furtherdescribed later in association with at least FIG. 14A. Accordingly, insome instances, the inner curved portions 653A, 653B of protrusions651A, 651B together define a seat 657 against which the ring 640Aremovable engages when the respective valve is in an open position.

In one aspect, the freely movable member (e.g. ring 640A, 640B) ismovable in a direction generally parallel with a direction of fluid flow(as represented by arrow FF) through the main chamber 604. In otherwords, the freely movable member does not generally move in a directionperpendicular to the direction of fluid flow through the main chamber604.

In some examples, rings 640A, 640B take the form of an annular ring asshown in at least FIGS. 17A-17B. In some examples, each ring 640A, 640Bis replaced by a freely movable member have a general disc shape, suchas the disc described and shown in association with at least FIGS.31-32, which does not have a central hole. However, it will beunderstood that such a disc-shaped member is not necessarily limited tothe method of making a pump as described in association with FIGS.28A-32.

In some examples, instead of having a ring-shape (e.g. 640A, 640B) thefreely movable member may have a disc shape (e.g. no central hole).

In some examples, instead of having ring-shaped freely movable member,the respective valves include a freely movable member having a non-ringshape, such as but not limited to a cone shape, spherical shape, etc. Insome instances, such shapes are suited for deployment in associationwith a method of making a pump, as later described in association withat least FIGS. 16-20, in which the shape and/or material of the freelymovable member is not generally limited by the materials and/orparticular fabrication arrangements to form the valve chamberscontaining the freely movable member.

In some examples, as further shown in FIGS. 13-14B, the first wall 620B,620C of the respective chamber portions 630A, 630B in each valve 606,608 extends in generally the same plane as the first wall 620A of themain chamber 604. In some examples, the first wall 620B, 620C of therespective chamber portions 630A, 630B in each valve 606, 608 extends inexactly the same plane as the first wall 620A of the main chamber 604because together they define a common wall.

In some examples, each ring 640A, 640B has a height (H2) that is morethan one-half the interior height (H3) of the valve chamber portion inwhich the respective rings 640A, 640B are contained. For illustrativesimplicity, one example of this relationship is shown later inassociation with at least FIG. 18. In one aspect, this arrangementprevents the respective rings 640A, 640B from rotating vertically into adifferent orientation. In other words, this arrangement ensures that theflat, generally planar sides of the rings 640A, 640B remains generallyparallel to the floor 620B, 620C of the respective valve chamberportions 630A, 630B.

In one aspect, by providing the freely movable member as ring-shapedstructure (as compared to a solid structure), less energy can be used tomove the member back and forth within the valve chamber 630A, 630B, suchthat a higher frequency response of freely movable member within eachrespective valve is achieved.

FIG. 15A is a sectional view of pump 600, according to one example ofthe present disclosure. As shown in FIG. 15A, pump 600 includes thestructure shown in FIGS. 13, 14A, 14B and further includes an externalforce applicator 672 and a membrane 670 covering main chamber 604 andinlet and outlet valves 606, 608. The external force applicator 672 isoperable to cause membrane 670 to selectively move (i.e. be deflected)inward or outward relative to main chamber 604 in repeating cycles toproduce alternating iterations of suction and expulsion on main chamber604. In some examples, the suction phase corresponds to an outwardstroke (represented by directional arrow A2) of the external forceapplicator 672 while the expulsion phase corresponds to an inward stroke(represented by directional arrow A1) of the external force applicator672.

In some examples, the membrane 670 is made of a material which issufficiently elastic to enable deflections (caused by the external forceapplicator 672) to move fluid through the pump. In some examples, themembrane 670 is made of a material formed of glass, silicon, or apolymer.

In some examples, instead of being located at a top portion of mainchamber 604, membrane 670 defines the floor 620A of a main chamber ofthe pump 600 with external force applicator 672 located beneath thefloor 620A. Other variations are described throughout the presentdisclosure, such as but not limited to, the examples of FIGS. 15C-15Ddescribed below.

More generally speaking, it will be understood that in some examples,any one of the walls (top, bottom, side, etc.) of the main chamber canbe at least partially defined by or formed as an at least partiallyelastic membrane to which a force applicator may be coupled.Accordingly, the function and operation of the chamber is not strictlydependent on a particular location or relative orientation (e.g. top,bottom, side, etc.) of the at least partially elastic membrane relativeto other walls defining the chamber.

In some examples, external force applicator 672 is a piezo-electricbased actuator, a thermal-resistive based actuator, or a magneticfield-based actuator. In some examples, these types of an external forceapplicator 672 are suited for deployment in (but not limited to) atleast the examples associated with FIGS. 21-26 and FIGS. 28A-32. Asnoted elsewhere, at least some of these same modalities also may beemployed as an internal force applicator to cause fluid actuation of thepump.

In some examples, external force applicator 672 comprises a rocker armcontrolled via a solenoid. In some examples, this type of an externalforce applicator 672 is suited for deployment in (but not limited to) atleast the example associated with FIGS. 16-20.

In some examples, as shown in FIG. 14A, in a suction phase free-floatingring 640B of outlet valve 608 is drawn into contact with and generallyblocks port 625 while free-floating ring 640A of inlet valve 606 isdriven into contact with seat 657 (formed by curved portions 653A,653B), thereby opening port 629 to receive fluid for flow into andthrough passages 627A, 627B to enter and fill main chamber 604, asrepresented via directional arrows F3.

In some examples, as shown in FIG. 14B, in an expulsion phasefree-floating ring 640A is driven into contact against and generallyblocks port 629 to inhibit intake of fluid into main chamber 604. At thesame time, free-floating ring 640B of outlet valve 608 is driven awayfrom port 625 and into contact with seat 647 (formed by curved portions643A, 643B), thereby permitting fluid to exit main chamber 604 and flowthrough passages 645A, 645B to exit the pump 600, as represented viadirectional arrows F4.

Accordingly, with this arrangement, external force applicator 672 actsin repeating cycles to cause suction and expulsion within main chamber604 (as shown in FIGS. 14A-14B) and thereby move fluid through the pump600.

In some examples in which the pump 600 serves as the pump 74 in theexamples described in association with at least FIG. 1B, pump 600 forcescoolant through the circulation loop 80 of a housing 52 of an electronicdevice 50. In some examples, pump 600 serves as a pump to move othertypes of fluids, including but not limited to, ink, solvents, etc.

It will be understood that in some examples, blocking of ports 629, 625via the respective rings 640A, 640B corresponds to significantlyobstructing ports 629, 625, but not completely sealing shut those ports629, 625. In other words, in some examples the presence of rings 640A,640B across the respective ports 629, 625 achieves at least adifferential relative resistance but does not necessarily involvecomplete sealing that would prevent all fluid flow. However, in someexamples, blocking of ports 629, 625 may involve completely sealing toprevent all liquid from flowing therethrough.

In another aspect, the direction of fluid flow (arrow FF) through thepump 600 is generally parallel to a plane through which a longitudinalaxis of the membrane 670 extends. In other words, the direction of fluidflow (arrow FF) through the main chamber 604 and the valves 606, 608 isnot perpendicular to the membrane 670.

In some examples, the respective rings 640A, 640B are made of materialsother than magnetic materials. Accordingly, the rings 640A, 640B are notmanipulated via magnetism to achieve different positions within arespective valve 606, 608 to open and close the valves. Rather,different positions of the ring 640A, 640B within the valves 606, 608are dictated in response to a fluid flow, which in turn is dictated viaforces exerted on the fluid (within a chamber) by a force applicator(e.g. 672) coupled to a main chamber 604 associated with the respectivevalves 606, 608. Accordingly, within the fluid, the rings 640A, 640Beach move freely (e.g. are free floating) within each respective valvechamber portion 630A, 630B.

FIG. 15B is a sectional view schematically illustrating a station 680 towhich a pump 688 is removably coupled, according to one example of thepresent disclosure. In some examples, pump 688 includes at least some ofsubstantially the same features and attributes as pump 600 described inassociation with at least FIGS. 13-15A, except for omitting an externalforce applicator 672 on the membrane 670 (FIG. 15A). In some suchexamples, the pump 688 is deployed in an environment other than movingcoolant within an electronic device.

As shown in FIG. 15B, in some examples station 680 includes a housing682 with a slot 684 and an external force applicator 686 positioned tobe exposed at slot 684. The slot 684 removably receives at least pump688 (on substrate 689) to enable removably coupling the external forceapplicator 686 relative to an at least partially elastic membrane 670 ofpump 688. In this way, the pump 688 becomes operable to control fluidflow through a circulating loop, in a manner consistent with thedescription associated with at least FIGS. 1-12. In some examples, whenuse of the pump 688 and any associated components is finished, the pump688 can be discarded as a disposable item. Meanwhile, the station 680(including external force applicator 686) is retained and available forfuture use with other pumps, thereby conserving both physical andfinancial resources. In some examples, such an arrangement is beneficialin medical applications and other environments where sterility issignificant.

FIG. 15C is sectional view schematically illustrating at least a portionof a pump 690 on a substrate, such as (but not limited to) printedcircuit board 70, according to one example of the present disclosure. Insome examples, pump 690 comprises at least some of substantiallyfeatures and attributes as the pump 600 of FIG. 15A, except for locatingthe external force applicator 692 underneath the main chamber 604(instead of on top of membrane 670 as in FIG. 15A) such that theexternal force applicator 692 is embedded within a portion of theprinted circuit board 70. Accordingly, in some such examples, theexternal force applicator 692 may be embodied at least partially as athermal resistor on or in the printed circuit board 70. In someexamples, the external force applicator 692 is formed generallycontemporaneously with, and is generally co-located with, othernon-pump-related circuitry formed on or in the printed circuit board 70.

In one aspect, this arrangement avoids a separate later step of affixingan external force applicator on top of a main chamber of a pump afterconstruction of the pump. Moreover, in the example of FIG. 15C, anyconnecting elements between the external force applicator 692 and theprinted circuit board 70 may be formed within or on the printed circuitboard 70, thereby avoiding the external presence and routing ofconnecting elements (e.g. wires) that would otherwise be involved inpowering and controlling the external force applicator mounted on top ofa pump.

In some examples of this arrangement shown in FIG. 15C, a first wall620A of the main chamber 604 of the pump 690 is provided with athickness and of a material suitable to function as a deflectablemembrane responsive to the action of the external force applicator 692.Accordingly, in this sense, instead of the element 670 serving as an atleast partially elastic membrane as shown and described in FIG. 15A, thelayer 694 of the main chamber 604 as shown in FIG. 15C comprises an atleast partially elastic membrane, which is deflectable as actuated bythe embedded external force applicator 692, to cause suction orexpulsion of fluids from the main chamber 604 of the pump 690 in amanner consistent with the previously described pumps in associationwith at least FIGS. 1-15A.

FIG. 15D is sectional view schematically illustrating at least a portionof a pump 695 on a substrate, such as (but not limited to) a printedcircuit board 70, according to one example of the present disclosure. Insome examples, pump 695 comprises at least some of substantiallyfeatures and attributes as the pump 690 of FIG. 15C, except for locatinga force applicator 696 to define the first wall 620A of the main chamber604 such that the force applicator 692 is exposed to an interior of themain chamber 604. Accordingly, in some instances, the force applicator692 may be referred to as an internal force applicator. In someexamples, the force applicator 696 is embedded within a portion of theprinted circuit board 70. In some examples, the force applicatorcomprises a thermal resistive-based actuator embedded with a siliconwafer substrate 70. In some examples, additional electronic elements(e.g. transistors, diodes, etc.) are also embedded within some portionof the silicon wafer substrate 70.

Accordingly, in some examples, this arrangement described in associationwith FIG. 15D may be employed in at least some of the examples laterdescribed in association with FIGS. 21-32 in which the internal forceapplicator 696 is employed instead of an external force applicator (e.g.845 in FIG. 26) with the internal force applicator 696 embedded (orotherwise provided) within an upper portion of a base structure (e.g.902 in FIGS. 28A-30 or 806 in FIGS. 21-26).

FIGS. 16-18 are each a sectional view schematically illustrating a valveduring a method of making a pump, according to one example of thepresent disclosure. In these Figures, cross-hatching is omitted forillustrative clarity. In some examples, the pump constructed accordingto this method may be employed as one of the pumps 74, 94, 174, 274,284, 354A-354C, 600, 688, 690, as previously described in associationwith at least FIGS. 1-15C. In some examples, the pump constructedaccording to the method described in association with FIGS. 16-18 isused in arrangements other than those previously described inassociation with at least FIGS. 1-15C.

In some examples, the sectional view in FIGS. 16-18 generallycorresponds to a sectional view like the view taken along lines 16-16 inFIG. 13 of a valve 608, except with FIGS. 16-18 representingintermediate stages of construction of the valve assembly in FIG. 13,whereas FIG. 13 represents a completed construction of valve 608 (exceptfor the covering membrane removed for illustrative purposes).

As shown in FIG. 16, in some examples a method of constructing a pumpbegins with molding, as a single piece, a main chamber, an inlet valvechamber, and an outlet valve chamber. The outlet valve chamber is at anopposite end of the main chamber from the inlet valve chamber. Aspreviously shown in FIG. 13, the main chamber and respective valvechamber portions of the pump being formed in FIGS. 16-18 extend in atleast generally same plane. In some instances, they extend in exactlythe same plane via a common first wall like the first wall 620A, 620B,620C of pump 600 in FIGS. 13-14B, with the common wall being identifiedas 712 in FIG. 16. In some examples, the molding of the pump includesinjection molding and the material used includes epoxy moldable compound(EMC). In some examples, the material is non-ceramic material. In someexamples, the material is a biocompatible material, such as but notlimited to, glass.

In one aspect, formation of the main chamber, inlet valve chamber, andoutlet valve chamber of the pump occurs without drilling.

FIG. 16 shows one sectional view of this molded, single piece 702 ashaving a first surface 704A and opposite second surface 704B, andopposite outer surfaces 706A, 706B. A chamber 710 of a valve (e.g.valves 606, 608 in FIGS. 13-14B) is defined by inner surfaces 711A, 711B(of respective walls 714A, 714B) and wall 712. In some examples, wall712 defines a floor or bottom wall. In some examples, wall 712 defines awall other than a floor or bottom wall.

In some examples, as shown in FIG. 17A, a freely movable member 730 isplaced into chamber 710 of molded portion 702. As shown in FIG. 17A-17B,in some examples, the freely movable member 730 is a ring structureincluding an inner wall 734 and an outer wall 732, as well as a firstsurface 736 and second surface 738. With further reference to FIG. 17A,it will be understood that freely movable member 730 does not have afixed position relative to surfaces 711A, 711B and wall 712 of moldedportion 702, but rather FIG. 17A illustrates a size and shape of freelymovable member 730 within a valve chamber portion 710 of a pump.Moreover, it will be understood that once fully constructed, the freelymovable member 730 will be movable within valve chamber portion 710 uponmovement of dielectric coolant within and/or through the valve chamberportion 710, which contains member 730 in a manner consistent previouslydescribed in association with at least FIGS. 13-15A.

In some examples, the freely movable member 730 is made of a materialdifferent than the single molded piece 720 (which defines the mainchamber and respective valve chamber portions). In some examples, thefreely movable member 730 is formed of a graphite material or othermaterial having lubricous qualities.

In some examples, the freely movable member 730 is made from a materialsuch that a position of the freely movable member 730 is notcontrollable via a force external to the respective inlet and outletvalves of the pump. Accordingly, in some examples, the freely movablemember 730 is made of a non-magnetic material.

With this in mind, FIG. 18 is a sectional view schematicallyillustrating a valve assembly including the addition of a membrane 750sealingly secured onto surface 704A of the molded portion 702 to furtherdefine valve chamber portion 710, which contains freely movable member730. In some examples, membrane 750 is made of an at least partiallyelastic material.

As shown in FIG. 18, the ring 730 is sized with a height (H2) relativeto a height (H3) of valve chamber portion 710 to allow gaps S1, S2 aboveand below freely movable member 730. It will be further understood thatbecause member 730 is freely movable within the valve chamber portion710, the gaps S1, S2 are not fixed in size and shape but ratherrepresent a temporary state within the valve chamber portion 710.

Via these arrangements, one can provide for a free-floating member aspart of valve (e.g. valves 606, 608) of a pump, such as pump 600 inFIGS. 13-15A.

FIGS. 19A-19B are each a sectional view schematically illustrating aportion of a valve of a pump following the construction of the pumpshown in FIGS. 16-18, according to one example of the presentdisclosure. As shown in FIG. 19A, a pump 753 includes an external forceapplicator 755 coupled to the membrane 750 to enable application ofexternal forces to cause cyclical deflections of membrane 750 inopposite directions to produce suction and expulsion actions within amain chamber (e.g. 604 in FIGS. 13-15A) of the pump, in a mannerconsistent with such operation as previously described and illustratedin association with at least FIGS. 13-15A. As further shown in FIG. 19A,wires 756, 757 are provided for powering and controlling operation ofthe external force applicator 755 and generally extend laterally andabove the pump 753.

FIG. 19B depicts a pump 763 having substantially the same features andattributes as the pump 753 of FIG. 19A, except for providing alternaterouting for wires 756, 757, according to one example of the presentdisclosure. In particular, as shown in FIG. 19B, walls 714A, 714B ofpump 753 are replaced with walls 764A, 764B for pump 763 and a membrane770 having apertures 777A, 777B extending from the top surface 704A tothe bottom surface 704B of pump 763. Each aperture 777A, 777B is sizedand shaped to house one of the respective wires 756, 757 to route wires756, 757 from external force applicator 755 above membrane 750 tosurface 704B to facilitate connection of wires 756, 757 to a printedcircuit board (e.g. PCB 70 in FIG. 1). In one aspect, routing the wiresin this manner provides a more compact and lower profile arrangement ona surface of a printed circuit board 70 or other substrate.

In some examples, a pump such as (but not solely limited to) pump 600shown in FIGS. 13-14B is formed by pressing or embossing instead ofmolding.

FIG. 20 is a sectional view schematically illustrating a valve assembly780 having at least substantially the same features and attributes asthe valve assembly 740 of FIG. 18, except further including an oppositesecond membrane 782 sealingly secured to the surface 704C of moldedwalls 714A, 714B to define valve chamber portion 710, which containsfreely movable member 730. A partial chamber is formed by molding orotherwise providing side walls 714A, 714B and then attaching at leastpartially elastic membranes on opposite surfaces of the partial chamber,respectively, of the partial main chamber structure. With thisarrangement, both at least partially elastic membranes 750, 782cooperate to create the previously described fluid actuation. In someexamples, a pump is made through a subtractive process in which a moldedblock of material is provided and then a removal technique (e.g.,drilling, machining, computer controller cutting (CNC), etc.) is appliedto form the requisite valve chambers and main chamber. In such anarrangement, after a main chamber and valve chamber is defined via suchremoval techniques, a freely moveable part (e.g., a ring 640A, disc,cone, spherical member, etc.) is placed within the defined valvechamber.

Accordingly, formation of the main chamber and valve chambers performedvia the examples and variations described in association with FIGS.16-20 may occur independent of the formation of the freely movablemember such that a greater range of materials, shapes, and formationmethods may be employed to produce the freely movable member, as notedabove.

While different methods are described later in association with FIGS.21-32 regarding formation of a separable structure within a valvechamber, in each of those methods, the resulting configuration resultsin a separable structure having the general operational characteristicsas described and illustrated in association with FIGS. 13-15A. With thisin mind, in some examples, the separable structure is made from amaterial such that a position of the separable structure (e.g. a freelymovable member) is not controllable via a force external to therespective inlet and outlet valves of the pump. Accordingly, in someexamples, the formed separable structure in the example methods (inassociation with FIGS. 21-26 and FIGS. 28A-32) is made of a non-magneticmaterial.

In some examples, the pumps constructed via the methods described inassociation with FIGS. 21-26 and FIGS. 28A-32 have openings and pathwayson the order of less than 100 microns and provide chambers and valvechambers having a depth of less than 1 millimeter. Accordingly, in someinstances, such pumps are referred to as micropumps and are employablein microfluidic applications. In some instances, these micropumps aredeployed on a scale commensurate with thermal inkjet modalities, andtherefore may be formed contemporaneously with, and may be co-locatedwith, components, modules, etc. of thermal inkjet structures and thermalinkjet-related structures. One example arrangement in which such pumpsmay be deployed is described later in association with at least FIGS.33-34.

FIGS. 21-26 are each a sectional view schematically illustrating aportion of a valve during a method of making a pump, according to oneexample of the present disclosure.

In some examples, the pump constructed according to this method may beemployed as one of the pumps 74, 94, 174, 274, 284, 354A-354C, 600, 680,688, as previously described in association with at least FIGS. 1-15D.In some examples, the pump constructed according to the method describedin association with FIGS. 21-26 is used in arrangements other than thosepreviously described in association with at least FIGS. 1-15D.

FIG. 21 is a sectional view schematically illustrating a base structure800 from which a pump (including a valve like valves 606, 608 in FIGS.13-14B) is constructed, according to one example of the presentdisclosure. As shown in FIG. 21, base structure 800 includes a firstlayer 802, an intermediate layer 804, and a second layer 806, with basestructure 800 defining a first surface 803A, second surface 803B, andopposite sides 805A, 805B. In some examples, the base structure 800includes a silicon-on-oxide structure and the intermediate layer 804comprises an oxide layer with the other layers comprising silicon.

However, in some examples, the base structure 800 includes any siliconwafer including a buried intermediate layer 804 (e.g. sacrificiallayer). In some examples, the intermediate layer 804 is a non-siliconmaterial. For instance, base structure 800 may be formed via sandwichingan epoxy layer between two separate silicon wafers to provide a single,bonded layered structure with the epoxy layer serving as theintermediate layer 804 (e.g. a sacrificial layer).

FIG. 22 schematically illustrates the removal of a portion of firstlayer 802 to form a ring-shaped structure 811A, as further shown in atleast the top view of FIG. 23B. In some instances, ring structure 811Ais referred to as a separable structure because the ring structure 811Awill later become separated from the other portions of the chamberportion 813. As shown in FIG. 22, this removal results in a chamberportion 813 with ring wall portions 810A, 810B extending upward from afirst floor portion 814 and spaced laterally from side walls 815 ofchamber portion 813. In some examples, such formation is performed viaphotolithography and anisotropic dry etching.

In some examples, the separable structure 811A is provided via adisc-shaped member (i.e. no central hole) instead of a ring-shapedstructure.

In some examples, the separable structure 811A is formed of the samematerial as the main chamber (e.g. 604 in FIGS. 13-14B) and the valvechamber portion 813 (or 630A, 630B in FIGS. 13-14B) of a pump.

As shown in FIG. 23A, this method further includes removal of an upperportion of the ring wall portions 810A, 810B (in FIG. 22) to produceshorter ring wall portions 820A, 820B and removal of a portion of firstlayer 802 to result in at least partial formation of correspondingportions of main chamber (e.g. 604 in FIGS. 13-14B), and valve chamberportion 813 (e.g. or 630A, 630B in FIGS. 13-14B). In some examples, suchformation is performed via anisotropic dry etching.

FIG. 24 schematically illustrates the addition of a membrane 832 ontosurface 803A of first layer 802 and above ring wall portions 820A, 820B,thereby resulting in spacing (S3) between the membrane 832 and a surface821 of ring wall portions 820A, 820B. This addition of membrane 832 alsoenables containment of a dielectric coolant or other fluid, which mayselectively flow through the pump after its construction is completed.

FIG. 25 schematically illustrates removal of a portion of intermediatelayer 804 to yield a gap 842 between remaining outer portions 844A, 844Bof intermediate layer 804. In some examples, the gap 842 has a width atleast as great as the width of the valve chamber 813. Removal of theportion of intermediate layer 804 below ring structure 811A produces agap (represented by spacing S4) below a bottom portion 823 of ringstructure 811A to thereby free ring structure 811A from the basestructure 800, yielding a ring structure 811S that is able to movefreely within valve chamber portion 813. Accordingly, in some instances,this free-floating ring structure 811S is referred to as a freelymovable member. In one aspect, the freely movable ring structure 811S ismade of the same material forming the valve chamber 813 (and/or mainchamber) which contains the ring structure 811. In some examples,removal of the portion of the intermediate layer 804 is performed viabuffered oxide etching (BOE).

In some instances, the intermediate layer 804 is referred to as asacrificial element because it is formed and then a portion of it islater sacrificed (i.e. removed) to form the freely movable ringstructure 811S.

In some examples, the removal of at least a portion of intermediatelayer 804 also results in at least partial formation of correspondingportions of central chamber (e.g. main chamber 604 in FIGS. 13-14B),valve chambers 606, 608 to define a first wall (e.g. 620A-620C in FIGS.13-14B) of those respective structures.

FIG. 26 is a sectional view schematically illustrating a pump, includinga valve, during a method of making the pump, according to one example ofthe present disclosure. As shown in FIG. 26, pump 846 includes theaddition of an external force applicator 845 on membrane 832 to enablecausing deflections of membrane 832 relative to a main chamber (e.g. 604in FIGS. 13-15A) to cause intake and expulsions of fluid, in a mannerconsistent with the operations previously described in association withat least FIGS. 13-15A. As mentioned elsewhere, in some examples otherforms of force application such as those described in association withat least FIGS. 15B-15D may be employed.

Accordingly, in some instances, the method described in association withFIGS. 21-26 is considered a subtractive process in which material is aportion of material is provided and then portions strategically removedto produce a pump including a main chamber, valve chambers, and a freelymovable portion for containment within the valve chambers.

FIG. 27 is a flow diagram 860 of a method 861 of forming a pump,according to one example of the present disclosure. In some examples,method 861 is performed according to the methods and componentspreviously described in association with at least FIGS. 21-26.

As shown in FIG. 27, method 861 includes forming, at an upper portion ofa base structure, a main chamber and a pair of valve chambers onopposite ends of the main chamber, including forming a separablestructure within each valve chamber.

At 864, method 861 includes removing at least a portion of a sacrificialelement to thereby separate a bottom portion of the separable structurefrom a floor of each respective valve chamber.

In some examples, method 861 is also applicable to the method of makinga pump as described in association with at least FIGS. 28A-32.

FIGS. 28A-32 are each sectional views schematically illustrating aportion of a valve during a method of making a pump, according to oneexample of the present disclosure. For illustrative clarity,cross-hatching has been omitted. In some examples, the pump constructedaccording to this method is employed as one of the pumps 74, 94, 174,274, 284, 354A-354C, 600, 680, 690, as previously described inassociation with at least FIGS. 1-15D. In some examples, the pumpconstructed according to the method described in association with FIGS.27-32 is used in arrangements other than those previously described inassociation with at least FIGS. 1-15D.

As shown in FIG. 28A, method 900 includes providing a base component 902having a surface 903, on which a sacrificial element 904 is formed. Insome examples, base component 902 is made of a material comprisingglass, silicon, ceramic, metal, or polymer.

As shown in FIG. 28B, a pair of first wall components 912A, 912B isformed onto surface 903 of base component 902. The sacrificial element904 is interposed therebetween and spaced apart (by a distance S5) fromthe respective wall components 912A, 912B. FIG. 28B also depicts athickness or height (H4) of first sacrificial element 904, which is lessthan a thickness or height (H5) of first wall components 912A, 912B.

In some examples, components of the pump other than base component 902are made from an epoxy-based negative photoresist material, such as (butnot limited to) SU-8 sold by MicroChem Corporation of Westborough, Mass.In some examples, base component 920 also may be made of the negativephotoresist material.

In some examples, the first layer 902 comprises a substrate, whichincludes embedded resistors and CMOS circuitry, so that a pump(including the main chamber and valve chambers) is formed on sameplatform as thermal inkjet (TIJ) structures and in some examples, may beformed contemporaneously with or collaboratively with thermal inkjetstructures and/or thermal inkjet-related structures.

In some examples, the sacrificial element includes a metal material or adialectic layer, such as chemical vapor deposition (CVD) oxide. In someexamples, the sacrificial element includes a semiconductor material,such as poly-silicon deposited via chemical vapor deposition (CVD) orphysical vapor deposition (PVD).

As shown in FIG. 29, a pair of second wall components 922A, 922B isformed on top of the first wall components 912A, 912B, respectively, anda separable structure 914 is formed on top of sacrificial element 904.In some examples, the separable structure 914 is formedcontemporaneously with second wall components 922A, 922B. In someexamples, such contemporaneous formation includes forming a single layerof material at specific, targeted locations, which results insimultaneous formation of the separable structure 914 and second wallscomponents 922A, 922B. In one aspect, separable structure 914 has athickness or height (H6), which is generally equal to a thickness orheight of the second wall components 922A, 922B.

As shown in FIG. 30, a membrane 942 is added or formed on top of thesecond wall elements 922A, 922B to at least partially define chamberportion 945, with a gap (G1) being formed between the separablestructure 914 and membrane 942. FIG. 31 shows a top view of structure914, revealing a generally disc-shaped member.

As shown in FIG. 32, sacrificial element 904 is removed, therebyseparating separable structure 914 from a surface 947 of base component902, which also acts as one wall of chamber portion 945. Upon suchseparation, a gap (S6) is introduced below separable structure 914. Inone aspect, in the arrangement of FIG. 32, separable structure 914 isfree-floating within chamber portion 945 such that structure 914 is freeto move about within chamber portion 945 in the presence of fluid in amanner consistent with the operations of inlet and outlet valves 606,608, as previously described and illustrated in association with atleast FIGS. 13-15D.

In some examples, separable structure 914 takes the form of a generallydisc-shaped member (FIG. 31) or a ring-shaped member, but in someexamples, separable structure 914 may take other shapes.

In some examples, prior to adding membrane 942, an additionalsacrificial layer is formed within the chamber portion 495 and on top ofthe separable structure 914 to ensure that separable structure 914 doesnot become secured to the membrane 942. The additional sacrificial layermay be then later removed when the sacrificial element 904 is removed,such that separable structure 914 becomes freely movable within theformed valve chamber as described above.

Accordingly, with regard to the examples of FIGS. 21-26 and/or FIGS.28A-32, a freely movable member is formed from at least some of the samematerial used to form the valve chamber in which the freely movablemember is contained.

As in various examples previously described herein, a force applicatorsuch as those described in association with at least FIGS. 15A-15D maybe employed with the valve and pump structure formed via the methoddescribed in association with FIGS. 28A-32.

Accordingly, in some instances, the method described in association withFIGS. 28A-32 is generally considered an additive process in which a basestructure is provided and then portions strategically added to a pumpincluding a main chamber, valve chambers, and a freely movable portionfor containment within the valve chambers. However, like the methoddescribed in association with FIGS. 21-26, the method of FIGS. 28A-32includes removal of a sacrificial element to separate the freely movablemember from other structures during formation of the pump.

FIGS. 33-34 are each block diagrams schematically illustrating a fluidejection system, according to one example of the present disclosure. Insome examples, the fluid ejection system may be an ink ejection system,such as in a printing system. It will be further understood that suchprinting systems may eject fluids other than ink. In some examples, thefluid ejection system is a thermal inkjet (TIJ) system.

As shown in FIG. 33, system 960 includes a fluid supply 962, a fluiddelivery module 964, nozzle(s) 966, and a pump 968. Via pathway 963A,fluid supply 962 supplies fluid to an input of the fluid delivery module964 and an output of fluid delivery module 964 delivers fluid in acontrolled manner (via pathway 963B) to an input of nozzle(s) 966 of aprinthead. Via a surplus fluid output, nozzle(s) 966 return surplusfluid via pathway 963C to a pump 968, which directs the surplus fluid toa surplus input of fluid delivery module 964. In this way, surplus fluidnot used in printing from nozzle(s) 966 is indirectly re-circulated tothe nozzle(s) 966 of a printhead.

As shown in FIG. 34, system 970 includes generally the same componentsas system 960 of FIG. 33, except with providing a different arrangementof pathways among the components of the fluid supply 962, fluid deliverymodule 964, nozzle(s) 966, and pump 968. Via pathway 965A, fluid supply962 supplies fluid to an input of the fluid delivery module 964 and anoutput of the fluid delivery module 964 delivers fluid in a controlledmanner (via pathway 965B) to nozzle(s) 966 of a printhead for printingvia a print output. However, via a surplus output, nozzle(s) 966 returnsurplus fluid via pathway 965C to pump 968, which re-directs the surplusfluid directly back into input of nozzle(s) 966.

In one aspect, the systems 960, 970 conserve resources by re-usingsurplus fluids. In some examples, the pump 968 in systems 960, 970 isconstructed according to at least some of the methods and/or components,as previously described herein in association with FIGS. 1-32.

At least some examples of the present disclosure provide for a fluidcontainment system within an electronic device to pump circulating fluidto cool heat-generating electronic components within the electronicdevice. At least some examples of the present disclosure provide pumpsfor use in such fluid containment systems, or other systems such asfluid ejection systems.

Although specific examples have been illustrated and described herein, avariety of alternate and/or equivalent implementations may besubstituted for the specific examples shown and described withoutdeparting from the scope of the present disclosure. This application isintended to cover any adaptations or variations of the specific examplesdiscussed herein.

The invention claimed is:
 1. A method of making a micropump, comprising:forming, at an upper portion of a base structure, a main chamber and apair of valve chambers on opposite ends of the main chamber, includingforming a separable structure within each valve chamber; and removing atleast a portion of a sacrificial element underneath the separablestructure to thereby separate a bottom portion of each respectiveseparable structure from a portion of each respective valve chamber tofree the respective separable structure for movement within and relativeto each respective valve chamber.
 2. The method of claim 1, whereinforming the separable structure within each valve chamber comprises:forming the sacrificial element on the upper portion of the basestructure; forming the separable structure on top of the sacrificialelement.
 3. The method of claim 2, comprising: forming a first portionof a wall portion of the main chamber and of the respective valvechambers; and contemporaneously with forming the separable structure,forming a second portion of the wall portion of the main chamber and therespective valve chambers, wherein forming the sacrificial elementcomprises forming the sacrificial element to have a thickness less thana thickness of the first portion of the respective wall portions,wherein forming the separable structure comprises forming the separablestructure to have a thickness generally equal to a thickness of thesecond portion of the respective wall portions.
 4. The method of claim1, comprising: prior to the removing the at least a portion of thesacrificial element, removing a top layer of the separable structure andremoving a layer of the respective valve chambers and the main chamber,thereby exposing at least a sacrificial element below the separablestructure.
 5. The method of claim 4, comprising: providing the basestructure as a silicon assembly in which a non-silicon intermediatelayer is sandwiched between two layers of silicon; and arranging atleast a portion of the non-silicon intermediate layer as the firstsacrificial element.
 6. The method of claim 5, comprising: forming thepump as part of a substrate, and wherein at least a portion of thesubstrate includes the silicon assembly.
 7. The method of claim 1,comprising: prior to removing at least a portion of the firstsacrificial element, adding an at least partially elastic membrane todefine at least one wall of the main chamber and to define at least onewall of the valve chambers to contain the separable structure; andcoupling a force applicator to the at least partially elastic membrane.8. The method of claim 1, wherein the pair of valve chambers includes:an inlet valve chamber at a first end of the main chamber; and an outletvalve chamber at an opposite second end of the main chamber and externalto the main chamber, wherein a common wall of the main chamber and thevalve chambers extends in generally the same plane.
 9. A micropumpcomprising: a main chamber; a pair of valves on opposite ends of themain chamber including: an inlet valve; and an outlet valve external tothe chamber, wherein the respective inlet valve and outlet valve eachcontain a freely movable member to selectively open and close eachrespective valve, wherein the freely movable member is formed from atleast some of the same material used to form a chamber portion of therespective valves; and a force applicator coupled relative to the mainchamber to alternately induce in the main chamber: a suction action inwhich the inlet valve is open and the outlet valve is closed; and anexpulsion action in which the inlet valve is closed and the outlet valveis open.
 10. The pump of claim 9, wherein the force applicator islocated at least one of: external to, and coupled to, an at leastpartially elastic membrane defining at least one wall of the mainchamber; within a substrate external to the main chamber and coupledrelative to an at least partially elastic membrane defining at least onewall of the main chamber; and within a substrate and defining at least aportion of a first wall of the main chamber exposed to an interior ofthe main chamber.
 11. The pump of claim 9, wherein the freely movablemember is movable in a direction generally parallel with a direction offluid flow through the main chamber.
 12. The pump of claim 9, whereinthe pump is located within an electronics device comprising: a housingenclosure at least sealingly containing: a printed circuit boardcarrying a plurality of spaced apart heat generating members; a barrierto define a circulation loop in which coolant is exposed to eachrespective heat generating member; and the pump positioned within thecirculation loop to cause flow of the coolant through the circulationloop, wherein the pump and the barrier form a monolithic structure as aprotruding portion of the printed circuit board.
 13. A pump comprising:a main chamber; a pair of valves on opposite ends of the main chamberincluding: an inlet valve positioned within a first end of the mainchamber; and an outlet valve external to the chamber, wherein therespective inlet valve and outlet valve each contain a freely movablemember to selectively open and close each respective valve, and whereinthe inlet valve, the outlet valve, and the main chamber extend ingenerally the same plane to guide fluid flow through the pump andmovement of the freely movable member in the same plane; an at leastpartially elastic membrane defining at least one wall of the mainchamber; and a force applicator coupled relative to the at leastpartially elastic membrane to alternately induce in the main chamber: asuction action in which the inlet valve is open and the outlet valve isclosed; and an expulsion action in which the inlet valve is closed andthe outlet valve is open.
 14. The pump of claim 9, wherein the freelymovable member is made from a material such that a position of thefreely movable member is not controllable via a force external to therespective inlet and outlet valves.
 15. The pump of claim 13, comprisingat least one of: a first printing system including: at least one nozzleof a printhead, including at least an input and a surplus output; afluid delivery module to receive fluid at a first input from a fluidsupply and to deliver fluid via an output to the input at least nozzle,the fluid delivery module including a second input; and the pump toreceive surplus fluid from the surplus outlet of the at least one nozzleand to deliver the surplus fluid to the second input of the fluiddelivery module; and a second printing system including: at least onenozzle of a printhead, including an input, a print output, and a surplusoutput; a fluid delivery module to receive fluid from a fluid supply andto deliver fluid to the input of the at least one nozzle; and the pumpto receive surplus fluid from the surplus outlet of the at least onenozzle and to deliver the surplus fluid directly to the input at leastone nozzle.